SEM NOTES

SEM INDEX

SEM Notes #1

Resolution

Spot Size
Signal to Noise Ratio
Electron Sources
- Tungsten
- LaB6
- FEG

Beam Specimen Interactions

Secondary Electrons
- Secondary Electron Detector
Backscattered Electrons
Characteristic X-Rays
Auger Electrons
Cathodluminescence
Specimen Current
Transmitted Electrons

Region of Primary Excitaion

Specimen Coating

Resolution vs. Depth of Field

SCANNING ELECTRON MICROSCOPY

Mechanics of SEM

Column
Scan Coils

LENS Aberations

Spherical
Chromatic
Diffraction
Astigmatism

Sources of distortion and image degradation in the SEM

Photography

Basic Principle
Exposure

Micrographs as Data

Micrographs as Data
Captions and Labels
Plate
Micrographics as Art
Presentation

SEM Notes #2

Scanning Confocal Microscopy

Nipkow Disk
LSM
AOD

Stereo Pairs

Electronic Manipulation of Images

Inverse Signal
Gamma
Tilt Compensation
Dynamic Focus
Raster Rotation

Image Processing

Image Capture
Contrast
Noise Reduction
Edge Enhancement

Output Devices

Printers
- Inkjet
- Thermal
- Laser
Film Chain
Thermal
Plain Paper

Image Analysis

Digital Image Processing

Image Storage

Run-length Coding
Differential Pulse Code Modulation
Negatives

Digital Confocal Microscopy

Scanning probe Microscopes

Low Voltage SEM

Size of Primary Beam Probe
Amplitude of Beam
Depth Penetration of Beam
Charging
In-Lens Detector

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